Title:
QUARTZ JIG FOR MANUFACTURING SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS583224
Kind Code:
A
Abstract:
PURPOSE:To contrive the reinforcement of a jig by using a reinforcement material consisting of metal oxide or a silicon carbide as the core material of a quartz jig. CONSTITUTION:A reinforcement material made of metal oxide or a silicon carbide is used as a core material 3 to form a quartz jig by covering the core material 3 with quartz. A substance which is chemically stable and having high melting point such as sapphire, tantalum oxide or the like is selected as the metal oxide. This will not drop the substrate unless the core material 3 is broken and the substrate can continuously be used even if an impact is applied to grooves 2 supporting a semiconductor substrate and a strut is broken.
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Inventors:
NAKAMICHI TADAHIRO
Application Number:
JP10178281A
Publication Date:
January 10, 1983
Filing Date:
June 29, 1981
Export Citation:
Assignee:
SUWA SEIKOSHA KK
International Classes:
H01L21/22; H01L21/673; (IPC1-7): H01L21/22
Attorney, Agent or Firm:
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