Title:
VACUUM EVAPORATOR
Document Type and Number:
Japanese Patent JPS5835920
Kind Code:
A
Abstract:
PURPOSE:To prevent scatter and injection of evaporating particles to a resist side wall, and to enhance the attachment coefficient of the particles to wafers by a method wherein shielding plates of the plural sheets having the opening part corresponding to the statically estimated angles viewing a sample holder from an evaporation source are provided in a gap between the evaporation source and the holder, and the holder and the shielding plates are respectively cooled. CONSTITUTION:The shielding plates 61-65 of the plural sheets are arranged in parallel mutually interposing the interval of 5cm in the gap between the evaporation source 4 and the sample holder 5 facing mutually interposing the interval of 50cm between them. At this time, the circular opening part corresponding to the solid angles alpha estimated viewing the holder 5 from the evaporation source 4 is provided in each shielding plate, and the evaporating current flowing from the evaporation source 4 toward the holder 5 is surrounded with the opening part. The vacuum evaporator is constituted by this way, the Si wafers 51, 52 of the plural sheets provided with resist patterns are adhered on the lower face of the holder 5, and the evaporation source 4 is provided in parallel having the deviation within 13 deg. in relation to the side wall of resist patterns. Accordingly the evaporating particles corresponding to the solid angles alpha only are made to reach the wafers 51, 52 and at the same time, the holder and the shielding plates are cooled at -60 deg.C or less using liquid nitrogen.
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Inventors:
KUROSAWA MASARU
ARAI KUNIHIRO
MIMURA YOSHIAKI
YANAGAWA FUMIHIKO
ARAI KUNIHIRO
MIMURA YOSHIAKI
YANAGAWA FUMIHIKO
Application Number:
JP13427881A
Publication Date:
March 02, 1983
Filing Date:
August 28, 1981
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
C23C14/24; H01L21/285; H01L21/306; (IPC1-7): C23C13/12; H01L21/306
Attorney, Agent or Firm:
Toshio Takayama