Title:
【発明の名称】半導体集積回路装置用測定ヘツド
Document Type and Number:
Japanese Patent JPS5841772
Kind Code:
B2
Abstract:
PURPOSE:To obtain a head for measuring IC having an increased number of pin electronics cards by disposing the cards in the upper and lower spaces of a socket and arranging alternately the positions into which the cards are to be inserted.
Inventors:
AIDA AKIRA
HANAYAMA SHINICHI
HANAYAMA SHINICHI
Application Number:
JP3394776A
Publication Date:
September 14, 1983
Filing Date:
March 27, 1976
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G01R31/26; H01L21/66; H05K13/00; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Inoue Kazuo