Title:
【発明の名称】抵抗加熱型真空蒸着装置
Document Type and Number:
Japanese Patent JPS5852024
Kind Code:
B2
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Inventors:
NAKAJIMA MASAHIKO
OOIZUMI HIROSHI
OOIZUMI HIROSHI
Application Number:
JP11620576A
Publication Date:
November 19, 1983
Filing Date:
September 28, 1976
Export Citation:
Assignee:
DENKI KAGAKU KOGYO KK
International Classes:
C23C14/26; (IPC1-7): C23C13/12