【発明の名称】ハンドウタイソウチノセイホウ

Title:

【発明の名称】ハンドウタイソウチノセイホウ

Document Type and Number:

Japanese Patent JPS5852350

Kind Code:

B2

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Inventors:

WADA TOSHIO

Application Number:

JP12281972A

Publication Date:

November 22, 1983

Filing Date:

December 07, 1972

Export Citation:

Assignee:

NIPPON ELECTRIC CO

International Classes:

H01L29/78; H01L21/28; H01L21/306; H01L21/336; (IPC1-7): H01L29/78; H01L29/60

Attorney, Agent or Firm:

Uchihara Shin

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