Title:
DUST GENERATOR
Document Type and Number:
Japanese Patent JPS5866836
Kind Code:
A
Abstract:
PURPOSE: To generate dust continuously and exactly in a prescribed rate, by rotating a disk provided with a groove, sucking dust filled in the groove, and supplying this dust to the necessary part.
CONSTITUTION: A cassette 1 is provided with a spiral groove 2 and this is filled with dust. The cassette 1 is fixed to a rotary table 4 with a fixing screw 3, covered with a airtight case 7, and rotated together with the rotary table 4 at a prescribed rotating speed. The dust in the groove 2 is sucked out with an ejector mechanism 8, and supplied to the outer part, thus permitting a prescribed rate of dust to be continuously and exactly supplied.
Inventors:
MASUDA HIROAKI
Application Number:
JP16548381A
Publication Date:
April 21, 1983
Filing Date:
October 16, 1981
Export Citation:
Assignee:
SANKYO DENGYO KK
International Classes:
G01N1/00; G01N1/28; (IPC1-7): G01N1/00
Attorney, Agent or Firm:
Mitsufumi Esaki (1 person outside)