Title:
【考案の名称】パタ-ン抵抗値測定装置
Document Type and Number:
Japanese Patent JPS5888169
Kind Code:
U
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Inventors:
Ryozo Sato
Application Number:
JP18359981U
Publication Date:
June 15, 1983
Filing Date:
December 11, 1981
Export Citation:
International Classes:
G01N27/00; G01R27/02; (IPC1-7): G01R27/02