DEVICE FOR TESTING INTEGRATED CIRCUIT CHIP

Title:

DEVICE FOR TESTING INTEGRATED CIRCUIT CHIP

Document Type and Number:

Japanese Patent JPS5889838

Kind Code:

A

Abstract:

Internal nodes of an integrated circuit chip are tested by applying a thinly focused electron beam to the node under control of a computer and then sensing secondary electron emission. The computer controls the application of test signals to the peripheral pad connections on the chip and intelligently selects a small number of nodes for testing which are the likeliest nodes to indicate circuit failure.

Inventors:

EDOWAADO DEII URUFU
FUEIKU SHINASHI OZUDEMIIRU

Application Number:

JP19542182A

Publication Date:

May 28, 1983

Filing Date:

November 09, 1982

Export Citation:

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Assignee:

HUGHES AIRCRAFT CO

International Classes:

G01R31/302; G01R31/305; G01R31/26; H01L21/66; (IPC1-7): G01R31/26; H01L21/66

Attorney, Agent or Firm:

Takehiko Suzue

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