Title:
【考案の名称】半導体装置
Document Type and Number:
Japanese Patent JPS5889934
Kind Code:
U
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Inventors:
Koichi Oguchi
Application Number:
JP14048482U
Publication Date:
June 17, 1983
Filing Date:
September 16, 1982
Export Citation:
International Classes:
H01L21/60; (IPC1-7): H01L21/60