Title:
CONTINUOUS MANUFACTURE OF SILICON NITRIDE
Document Type and Number:
Japanese Patent JPS5891014
Kind Code:
A
Abstract:
PURPOSE: To obtain silicon nitride continuously and easily by heating pellets contg. silica, fine carbon powder and chaff powder in a prescribed ratio in an atmosphere of gaseous N2 or NH3 to cause reduction and nitriding.
CONSTITUTION: A mixture consisting of silica and fine carbon powder in ≤4 molar ratio of C/SiO2 is prepared. To the mixture is added 5W50% as dry matter of chaff powder, and they are pelletized. The pellets are fed to a vertical electric furnace, and after introducing gaseous N2 or NH3, the pellets are heated to cause reduction and nitriding reactions. Thus, silicon nitride is obtd. continuously and easily.
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Inventors:
SAWAMURA KENTAROU
YOSHIDA YASUO
KAYANO NAGANORI
YOSHIDA YASUO
KAYANO NAGANORI
Application Number:
JP18897881A
Publication Date:
May 30, 1983
Filing Date:
November 25, 1981
Export Citation:
Assignee:
SHOWA DENKO KK
International Classes:
C01B21/068; (IPC1-7): C01B21/068
Attorney, Agent or Firm:
Masatake Shiga