Title:
【考案の名称】半導体圧力変換器
Document Type and Number:
Japanese Patent JPS5892745
Kind Code:
U
Inventors:
Haruo Yamauchi
Application Number:
JP18624781U
Publication Date:
June 23, 1983
Filing Date:
December 16, 1981
Export Citation:
International Classes:
H01L29/84; G01L9/00; G01L9/04; (IPC1-7): H01L29/84