Title:
【考案の名称】軟X線転写マスク
Document Type and Number:
Japanese Patent JPS5895041
Kind Code:
U
Inventors:
Miyazaki Masaru
Mikio Ichihashi
Mikio Ichihashi
Application Number:
JP18806281U
Publication Date:
June 28, 1983
Filing Date:
December 18, 1981
Export Citation:
International Classes:
H01L21/027; H01L21/30; (IPC1-7): H01L21/30