PURPOSE: To effectively transmit a transfer clock pulse by integrally forming transfer electrode group at one end.

CONSTITUTION: The first phase transfer clock pulse 1 is applied to the first phase transfer electrodes 10a∼10d. The second phase transfer clock pulse 2 is applied to the second phase transfer electrodes 11a∼11d. Signal charge obtained at photoelectric converters 1a∼1d is transferred in parallel through a transfer control electrode 6 to the electrodes 10a∼10d. The electrodes 11a∼11d and 10a∼ 10d are integrally formed in the region along a transfer channel region 9. The connecting parts 7a∼7d, 8a∼8d of the electrodes 10a∼10d and 11a∼11d to metal wirings 4, 5 which supply clock pulses are arranged at opposite side to the elements 1a∼1d.