Title:
【考案の名称】赤外線加熱処理装置
Document Type and Number:
Japanese Patent JPS59109134
Kind Code:
U
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Inventors:
Yamanaka Satoshi
Application Number:
JP314783U
Publication Date:
July 23, 1984
Filing Date:
January 12, 1983
Export Citation:
International Classes:
H05B3/10; H01L21/18; H01L21/26; H01L21/324; H05B3/00; (IPC1-7): H01L21/18; H05B3/00