Title:
【考案の名称】吸着部の真空圧検知機能付き真空発生装置
Document Type and Number:
Japanese Patent JPS59112593
Kind Code:
U
Inventors:
Mitsuyasu Nishizawa
Application Number:
JP650983U
Publication Date:
July 30, 1984
Filing Date:
January 20, 1983
Export Citation:
International Classes:
F04F5/20; B25J15/06; B65G47/91; (IPC1-7): B25J15/06; B65G47/91; F04F5/20
Domestic Patent References:
| JPS49134056A | 1974-12-24 | |||
| JPS5245377A | 1977-04-09 | |||
| JPS5383485A | 1978-07-22 |