Title:
【発明の名称】低温乾燥装置
Document Type and Number:
Japanese Patent JPS5913674
Kind Code:
B2
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Inventors:
TERADA TAKESHI
Application Number:
JP13816476A
Publication Date:
March 31, 1984
Filing Date:
November 17, 1976
Export Citation:
Assignee:
FUJI ELECTRIC CO LTD
International Classes:
F26B17/20; C02F11/12; F26B11/04; F26B21/00; (IPC1-7): F26B21/04
Attorney, Agent or Firm:
Iwao Yamaguchi