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Title:
【考案の名称】ウエハ-取扱装置
Document Type and Number:
Japanese Patent JPS59145034
Kind Code:
U
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Inventors:
Yoshiya Hirano
Application Number:
JP3756883U
Publication Date:
September 28, 1984
Filing Date:
March 17, 1983
Export Citation:
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International Classes:
H01L21/677; B26B11/00; B65H1/12; B65H3/08; B65H3/46; B65H3/56; B65H5/08; H01L21/673; H01L21/68; (IPC1-7): H01L21/68; B26B11/00



 
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