Title:
【発明の名称】電界効果トランジスタの製造方法
Document Type and Number:
Japanese Patent JPS5914906
Kind Code:
B2
Inventors:
SUZUKI TAKESHI
KADOWAKI YOSHINOBU
ISHII TAKASHI
OOTSUBO MUTSUYUKI
KADOWAKI YOSHINOBU
ISHII TAKASHI
OOTSUBO MUTSUYUKI
Application Number:
JP13915479A
Publication Date:
April 06, 1984
Filing Date:
October 25, 1979
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L21/28; H01L21/338; H01L21/52; H01L23/36; H01L29/80; H01L29/812; (IPC1-7): H01L29/80; H01L21/28; H01L21/58; H01L23/36
Attorney, Agent or Firm:
Masuo Oiwa
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