Title:
【発明の名称】パタ-ン検査装置
Document Type and Number:
Japanese Patent JPS5932891
Kind Code:
B2
Inventors:
TAKECHI SHIZUHITO
SUGYAMA HISASHI
SUGYAMA HISASHI
Application Number:
JP1337883A
Publication Date:
August 11, 1984
Filing Date:
January 28, 1983
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
G01N21/88; G01N21/93; G01N21/956; G03F1/84; G06T7/00; H01L21/027; H01L21/30; H01L21/66; (IPC1-7): H01L21/30; G01N21/00; G06K9/00
Attorney, Agent or Firm:
Uchihara Shin