Title:
【考案の名称】光学式変位センサ
Document Type and Number:
Japanese Patent JPS5940816
Kind Code:
U
Inventors:
Shin Shinobu
Application Number:
JP13483982U
Publication Date:
March 15, 1984
Filing Date:
September 07, 1982
Export Citation:
International Classes:
G01B11/00; G01D5/34; G01D5/347; (IPC1-7): G01D5/34; G01B11/00
Domestic Patent References:
| JPS5083055A | 1975-07-04 |