Title:
【考案の名称】真空処理装置に於けるワ-ク搬送装置
Document Type and Number:
Japanese Patent JPS5993139
Kind Code:
U
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Inventors:
Fujiki Osamu
Application Number:
JP18804082U
Publication Date:
June 25, 1984
Filing Date:
December 14, 1982
Export Citation:
International Classes:
B65H1/00; B25B11/00; B25J15/08; C23C14/50; H01L21/673; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B25B11/00; B65H1/00