【考案の名称】縦形半導体熱処理炉

Title:

【考案の名称】縦形半導体熱処理炉

Document Type and Number:

Japanese Patent JPS60111037

Kind Code:

U

Inventors:

Water product Yoichi

Application Number:

JP20132983U

Publication Date:

July 27, 1985

Filing Date:

December 28, 1983

Export Citation:

International Classes:

H01L21/22; (IPC1-7): H01L21/22

Domestic Patent References:

Previous Patent: JPS60111036

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