Title:
【考案の名称】ウエハ用ピンセツト
Document Type and Number:
Japanese Patent JPS60117061
Kind Code:
U
Inventors:
Yasuda Satoshi
Application Number:
JP392784U
Publication Date:
August 07, 1985
Filing Date:
January 14, 1984
Export Citation:
International Classes:
B25B9/02; H01L21/02; H01L21/677; (IPC1-7): B25B9/02; H01L21/02
Domestic Patent References:
| JPS5318316A | 1978-02-20 |