Title:
【考案の名称】低温プラズマ発生用電極
Document Type and Number:
Japanese Patent JPS60151295
Kind Code:
U
Inventors:
Tokuki Goto
Nakano Katsunobu
Nakano Katsunobu
Application Number:
JP3792684U
Publication Date:
October 08, 1985
Filing Date:
March 15, 1984
Export Citation:
International Classes:
H05H1/46; B29C71/04; C08J7/00; H02K44/10; H05H1/30; (IPC1-7): H02K44/10; B29C71/04; C08J7/00; H05H1/30