Title:
【発明の名称】精密位置決め装置
Document Type and Number:
Japanese Patent JPS6043267
Kind Code:
B2
Inventors:
KENBO YUKIO
NAKAGAWA YASUO
MAKIHIRA HIROSHI
NAKAGAWA YASUO
MAKIHIRA HIROSHI
Application Number:
JP5651076A
Publication Date:
September 27, 1985
Filing Date:
May 19, 1976
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B23Q15/24; B23Q3/18; B23Q16/00; H01L21/00; H01L21/68; (IPC1-7): B23Q15/24; H01L21/00
Attorney, Agent or Firm:
Ogawa Katsuo
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