Title:
【発明の名称】検査装置及び方法
Document Type and Number:
Japanese Patent JPS60500270
Kind Code:
A
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Inventors:
Baker, Lionel Lichyard
Application Number:
JP50010684A
Publication Date:
February 28, 1985
Filing Date:
December 14, 1983
Export Citation:
Assignee:
Cogent Limited
International Classes:
G01N21/88; G01N21/89; G01N21/93; (IPC1-7): G01N21/88
Attorney, Agent or Firm:
Suzuki Ikuo