Title:
【発明の名称】半導体ウェハのための万能平面方向付け装置
Document Type and Number:
Japanese Patent JPS60501436
Kind Code:
A
Inventors:
Lee, Stephen Nyon
Application Number:
JP50226284A
Publication Date:
August 29, 1985
Filing Date:
May 22, 1984
Export Citation:
Assignee:
AS Cu-Boats Inco-Polled
International Classes:
B65G1/20; B65G47/248; H01L21/67; H01L21/68; (IPC1-7): B65G1/20; H01L21/68
Attorney, Agent or Firm:
Fukami Hisaro