Title:
【発明の名称】半導体ウエハへの不純物拡散法
Document Type and Number:
Japanese Patent JPS6054773
Kind Code:
B2
Inventors:
SUZUKI KENJI
Application Number:
JP13003879A
Publication Date:
December 02, 1985
Filing Date:
October 11, 1979
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/223; (IPC1-7): H01L21/22
Attorney, Agent or Firm:
Ogawa Katsuo