Title:
【考案の名称】拡散源塗布装置
Document Type and Number:
Japanese Patent JPS6081646
Kind Code:
U
Inventors:
Junji Iguchi
Application Number:
JP17381183U
Publication Date:
June 06, 1985
Filing Date:
November 10, 1983
Export Citation:
International Classes:
H01L21/225; B05C5/00; (IPC1-7): H01L21/225; B05C5/00
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