Title:
【考案の名称】スパツタ装置における基板ホルダ-の位置可変機構
Document Type and Number:
Japanese Patent JPS6093758
Kind Code:
U
Inventors:
Yasuhiko Sato
Application Number:
JP18579783U
Publication Date:
June 26, 1985
Filing Date:
December 02, 1983
Export Citation:
International Classes:
H01L21/683; C23C14/50; H01L21/31; H01L21/67; H01L21/68; (IPC1-7): C23C14/50; H01L21/31; H01L21/68