Document Type and Number:
Japanese Patent JPS61117253
Kind Code:
U
Application Number:
JP20213684U
Publication Date:
July 24, 1986
Filing Date:
December 28, 1984
Export Citation:
International Classes:
F16B47/00; H01L21/67; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; F16B47/00