Document Type and Number:
Japanese Patent JPS61147090
Kind Code:
U
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Application Number:
JP3022085U
Publication Date:
September 10, 1986
Filing Date:
March 05, 1985
Export Citation:
International Classes:
H01L35/00; A47K3/00; B01F27/91; (IPC1-7): A47K3/00; B01F7/22; B01F15/00; H01L35/00