Document Type and Number:
Japanese Patent JPS61153341
Kind Code:
U
Application Number:
JP3623685U
Publication Date:
September 22, 1986
Filing Date:
March 15, 1985
Export Citation:
International Classes:
F27B9/02; B29C35/02; H01L21/56; (IPC1-7): H01L21/56; B29C35/02; F27B9/02