Document Type and Number:
Japanese Patent JPS6118759
Kind Code:
Y2
Application Number:
JP6237381U
Publication Date:
June 06, 1986
Filing Date:
April 28, 1981
Export Citation:
International Classes:
A47B77/10; A47B46/00; A47B51/00; (IPC1-7): A47B77/10; A47B51/00
Previous Patent: The recording medium which recorded the substrate processing device, the substrate treating method, ...
Next Patent: JPS6118760
Next Patent: JPS6118760