Document Type and Number:
Japanese Patent JPS61195049
Kind Code:
U
More Like This:
JP3713447 | DEVELOPER |
JP2000016567 | BELT CLEANING DEVICE |
JPS61272935 | SEMICONDUCTOR SUBSTRATE CLEANING PROCESS |
Application Number:
JP7863785U
Publication Date:
December 04, 1986
Filing Date:
May 28, 1985
Export Citation:
International Classes:
B08B3/04; H01L21/304; (IPC1-7): H01L21/304; B08B3/04