Document Type and Number:
Japanese Patent JPS61195052
Kind Code:
U
Application Number:
JP7819885U
Publication Date:
December 04, 1986
Filing Date:
May 24, 1985
Export Citation:
International Classes:
H01L21/31; H01L21/316; (IPC1-7): H01L21/316; H01L21/31
Domestic Patent References:
JP58131627B | ||||
JP58131628B |