Document Type and Number:
Japanese Patent JPS61205141
Kind Code:
U
Application Number:
JP8916385U
Publication Date:
December 24, 1986
Filing Date:
June 13, 1985
Export Citation:
International Classes:
H01L21/677; B65D85/38; H01L21/67; H01L21/68; (IPC1-7): H01L21/68; B65D85/38
Domestic Patent References:
| JPS525261B1 | 1977-02-10 | |||
| JPS5389675A | 1978-08-07 |