Document Type and Number:
Japanese Patent JPS6122715
Kind Code:
Y2
Application Number:
JP13230382U
Publication Date:
July 08, 1986
Filing Date:
September 02, 1982
Export Citation:
International Classes:
B08B1/04; B08B11/00; G03F1/00; G03F1/82; H01L21/302; H01L21/304; (IPC1-7): B08B11/00; B08B1/04