Document Type and Number:
Japanese Patent JPS6133904
Kind Code:
B2
Abstract:
By means of the nozzle, three gaseous curtains are formed converging on the surface of the substrate heated to a temperature of about 600 DEG C. which is driven in translatory movement, the intermediate curtain being constituted by a gaseous reactant or a reactant diluted in a carrier gas and the two lateral curtains being constituted by another naturally gaseous reactant or reactant diluted in a gas. The gaseous products of the reaction issuing from the nozzle are compelled to flow above a predetermined region of the substrate and these products are evacuated by suction by means of channels disposed at the extremities of this region of the substrate and a pump to which the channels are connected.
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Inventors:
RAINHARUTO KARUPUSUKOPUPU
OTSUTOO BAUMUBERUGAA
OTSUTOO BAUMUBERUGAA
Application Number:
JP1561380A
Publication Date:
August 05, 1986
Filing Date:
February 13, 1980
Export Citation:
Assignee:
SIV SOC ITALIANA VETRO
International Classes:
C03C17/23; C03C17/00; C03C17/245; C23C16/44; C23C16/453; C23C16/455; C23C16/54; H05B3/84