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Document Type and Number:
Japanese Patent JPS6136380
Kind Code:
B2
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Inventors:
NAKAJIMA HISAO
Application Number:
JP12362778A
Publication Date:
August 18, 1986
Filing Date:
October 09, 1978
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01L21/76; H01L21/283; H01L21/316



 
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