Document Type and Number:
Japanese Patent JPS6142182
Kind Code:
B2
Inventors:
KIKUCHI MORIO
Application Number:
JP1699976A
Publication Date:
September 19, 1986
Filing Date:
February 20, 1976
Export Citation:
Assignee:
ULVAC CORP
International Classes:
F26B7/00; F26B5/04