Document Type and Number:
Japanese Patent JPS6156498
Kind Code:
B2
Abstract:
This invention relates to an improvement in a light-sensitive layer transfer material comprising a temporary film support and a light-sensitive thermoplastic photoresist layer detachably connected therewith, the improvement being that the underside of the film support has a lower adhesion to the photoresist layer than its upper side. The invention also relates to a process for transferring a light-sensitive photoresist layer from a temporary to a permanent support.
Inventors:
UERUNERU FURANKE
MARUKUSU ZAIBERU
MARUKUSU ZAIBERU
Application Number:
JP15694978A
Publication Date:
December 02, 1986
Filing Date:
December 21, 1978
Export Citation:
Assignee:
HOECHST AG
International Classes:
G03F7/34; G03F7/00; G03F7/004; G03F7/09; G03F7/11; G03F7/16