Document Type and Number:
Japanese Patent JPS6161053
Kind Code:
B2
Inventors:
OKAMOTO KYOKAZU
Application Number:
JP14396178A
Publication Date:
December 24, 1986
Filing Date:
November 21, 1978
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
G01L1/00; B23Q35/26; B23Q35/30; B23Q35/34; G01D3/06; G01D5/12; G01D5/14; G01L1/08