Document Type and Number:
Japanese Patent JPS619195
Kind Code:
Y2
Application Number:
JP10093873U
Publication Date:
March 22, 1986
Filing Date:
August 28, 1973
Export Citation:
International Classes:
H01J37/08; C23C14/24; C23C14/34; F04B37/02; G01L21/30; G01L21/34; H01J41/08; (IPC1-7): F04B37/02; C23C14/24; C23C14/34; G01L21/34; H01J37/08
Next Patent: ディスクロータ