Document Type and Number:
Japanese Patent JPS6192071
Kind Code:
U
Application Number:
JP17682684U
Publication Date:
June 14, 1986
Filing Date:
November 21, 1984
Export Citation:
International Classes:
H03H9/02; H01L27/00; H03H1/02; H03H9/05; (IPC1-7): H01L27/00; H03H1/02; H03H9/05