Document Type and Number:
Japanese Patent JPS62111631
Kind Code:
U
Application Number:
JP20282585U
Publication Date:
July 16, 1987
Filing Date:
December 28, 1985
Export Citation:
International Classes:
H01L31/04; G01G19/413; G01G19/414; G01G21/22; G01G23/00; G01G23/37; (IPC1-7): G01G19/413; G01G21/22; G01G23/37; H01L31/04
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