Document Type and Number:
Japanese Patent JPS62131443
Kind Code:
U
Application Number:
JP1785086U
Publication Date:
August 19, 1987
Filing Date:
February 10, 1986
Export Citation:
International Classes:
G01N21/88; G01N21/956; G01R31/26; H01L23/00; (IPC1-7): H01L23/00; G01N21/88; G01R31/26