Document Type and Number:
Japanese Patent JPS62152461
Kind Code:
U
Application Number:
JP4031186U
Publication Date:
September 28, 1987
Filing Date:
March 19, 1986
Export Citation:
International Classes:
H01L23/50; H01L23/12; H01L23/48; H01L25/10; H01L25/18; H03F1/00; H03F3/189; (IPC1-7): H01L23/48; H01L23/12; H01L25/10; H03F1/00; H03F3/189