Document Type and Number:
Japanese Patent JPS62156957
Kind Code:
U
Application Number:
JP4433586U
Publication Date:
October 05, 1987
Filing Date:
March 25, 1986
Export Citation:
International Classes:
G03F1/00; G03F1/62; H01L21/027; H01L21/30; (IPC1-7): G03F1/00; H01L21/30
Domestic Patent References:
| JPS6075835A | 1985-04-30 |