Document Type and Number:
Japanese Patent JPS62158756
Kind Code:
U
Application Number:
JP4704286U
Publication Date:
October 08, 1987
Filing Date:
March 29, 1986
Export Citation:
International Classes:
H01J37/20; H01J37/317; H01L21/265; (IPC1-7): H01J37/20; H01J37/317; H01L21/265
Domestic Patent References:
| JPS5932198U | 1984-02-28 | |||
| JPS5986143A | 1984-05-18 |